JPH01112041U - - Google Patents
Info
- Publication number
- JPH01112041U JPH01112041U JP595588U JP595588U JPH01112041U JP H01112041 U JPH01112041 U JP H01112041U JP 595588 U JP595588 U JP 595588U JP 595588 U JP595588 U JP 595588U JP H01112041 U JPH01112041 U JP H01112041U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- predetermined position
- resist
- light
- transports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims 3
- 230000032258 transport Effects 0.000 claims 2
- 230000007723 transport mechanism Effects 0.000 claims 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595588U JPH01112041U (en]) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595588U JPH01112041U (en]) | 1988-01-22 | 1988-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01112041U true JPH01112041U (en]) | 1989-07-27 |
Family
ID=31209780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP595588U Pending JPH01112041U (en]) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01112041U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02288326A (ja) * | 1989-04-28 | 1990-11-28 | Dainippon Screen Mfg Co Ltd | ウエハの周辺部露光装置 |
-
1988
- 1988-01-22 JP JP595588U patent/JPH01112041U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02288326A (ja) * | 1989-04-28 | 1990-11-28 | Dainippon Screen Mfg Co Ltd | ウエハの周辺部露光装置 |
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